The 909 Project Very Scale Integrated Circuit Feme ke morero o moholo oa kaho ea indasteri ea elektronike ea naha ea heso nakong ea Moralo oa Borobong oa Lilemo tse Hlano oa ho hlahisa li-chips tse nang le bophara ba line ea 0.18 microns le bophara ba 200 mm.
Theknoloji ea tlhahiso ea lipotoloho tse kholo haholo tse kopantsoeng ha e akarelletse feela theknoloji e phahameng ea ho nepahala e kang micro-machining, empa hape e beha litlhoko tse phahameng mabapi le bohloeki ba khase.
Phepelo ea khase e ngata bakeng sa Project 909 e fanoe ke khoebo e kopanetsoeng lipakeng tsa Praxair Utility Gas Co., Ltd. ea United States le mekha e amehang Shanghai ho theha ka kopanelo setsi sa tlhahiso ea khase. Setsi sa tlhahiso ea khase se haufi le feme ea projeke ea 909. moaho, o nkang sebaka sa lisekoere-mithara tse ka bang 15,000. Litlhokahalo tsa bohloeki le tlhahiso ea likhase tse fapaneng
Naetrojene e hloekileng (PN2), naetrojene (N2), le oksijene e hloekileng (PO2) e hlahisoa ka ho arohana ha moea. Hydrogen e phahameng-e hloekileng (PH2) e hlahisoa ke electrolysis. Argon (Ar) le helium (He) li rekoa kantle ho naha. Khase ea quasi e hloekisoa 'me e tlhotliloeng hore e sebelisoe ho Project 909. Khase e khethehileng e fanoa ka libotlolong, 'me khabinete ea botlolo ea khase e teng sebokeng se thusang sa setsi sa tlhahiso ea potoloho e kopanetsoeng.
Likhase tse ling li boetse li kenyelletsa tsamaiso ea CDA ea moea e hloekileng e omeletseng, e nang le molumo oa tšebeliso ea 4185m3 / h, phoka ea khatello ea -70 ° C, le boholo ba karoloana e seng ho feta 0.01um ka khase sebakeng sa tšebeliso. Sistimi e phefumolohang e hatelitsoeng ka moea (BA), bophahamo ba tšebeliso ea 90m3 / h, phoka ea khatello ea 2 ℃, boholo ba karoloana ea khase sebakeng sa ts'ebeliso ha e kholo ho feta 0.3um, sistimi ea vacuum (PV), bophahamo ba tšebeliso 582m3 / h, vacuum degree sebakeng sa tšebeliso -79993Pa . Sistimi ea ho hloekisa (HV), bophahamo ba tšebeliso ea 1440m3 / h, degree ea vacuum sebakeng sa tšebeliso -59995 Pa. Kamore ea compressor ea moea le kamore ea pompo ea vacuum ka bobeli li sebakeng sa fektheri ea projeke ea 909.
Khetho ea lisebelisoa tsa liphaephe le lisebelisoa
Khase e sebelisoang tlhahiso ea VLSI e na le litlhoko tse phahameng haholo tsa bohloeki.Liphaephe tsa khase tse hloekileng haholohangata li sebelisoa libakeng tse hloekileng tsa tlhahiso, 'me taolo ea bona ea bohloeki e lokela ho lumellana kapa e phahame ho feta boemo ba bohloeki ba sebaka se sebelisoang! Ho phaella moo, liphaephe tsa khase tse hloekileng haholo li atisa ho sebelisoa libakeng tse hloekileng tsa tlhahiso. Hydrojene e hloekileng (PH2), oksijene e hloekileng haholo (PO2) le likhase tse ling tse khethehileng li ka tuka, lia phatloha, li tšehetsa ho tuka kapa likhase tse chefo. Haeba tsamaiso ea liphaephe tsa khase e entsoe ka mokhoa o sa lokelang kapa lisebelisoa li khethiloe ka tsela e fosahetseng, ho ke ke ha e-ba feela hore ho hloeka ha khase e sebelisoang sebakeng sa khase ho tla fokotseha, empa hape ho tla hlōleha. E finyella litlhoko tsa ts'ebetso, empa ha e bolokehe ho sebelisoa 'me e tla baka tšilafalo fekthering e hloekileng, e amang polokeho le bohloeki ba fektheri e hloekileng.
Tiisetso ea boleng ba khase e hloekileng sebakeng sa tšebeliso ha e itšetlehe feela ka ho nepahala ha tlhahiso ea khase, lisebelisoa tsa ho hloekisa le li-filters, empa e boetse e ameha haholo ka lintlha tse ngata tsamaisong ea lipeipi. Haeba re itšetleha ka lisebelisoa tsa tlhahiso ea khase, lisebelisoa tsa tlhoekiso le li-filters Ho fosahetse ho beha litlhoko tse nepahetseng ka ho fetesisa ho lefella moralo o sa nepahalang oa liphaephe tsa khase kapa khetho ea thepa.
Nakong ea ts'ebetso ea morero oa 909, re ile ra latela "Khoutu ea Moralo oa Limela tse Hloekileng" GBJ73-84 (tekanyetso ea hajoale ke (GB50073-2001)), "Khoutu ea Moralo oa Lits'oants'o tsa Moea tse Khatelitsoeng" GBJ29-90, "Khoutu bakeng sa Moralo oa Liteishene tsa Oxygen" GB50030-91 , "Khoutu ea Moralo oa Litsi tsa Hydrogen le Oxygen" GB50177-93, le mehato e nepahetseng ea tekheniki bakeng sa khetho ea lisebelisoa tsa liphaephe le lisebelisoa. "Khoutu ea Moralo oa Limela tse Hloekileng" e hlalosa khetho ea lisebelisoa tsa lipeipi le li-valve ka tsela e latelang:
(1) Haeba bohloeki ba khase bo le boholo ho feta kapa bo lekana le 99.999% le ntlha ea phoka e ka tlaase ho -76 ° C, 00Cr17Ni12Mo2Ti phala ea tšepe e sa hloekang ea carbon e tlaase (316L) e nang le lerako le ka hare la electropolished kapa OCr18Ni9 phala ea tšepe e sa hloekang (304) lerako le ka hare la electropolished le lokela ho sebelisoa. Belofo e lokela ho ba valve ea diaphragm kapa bellows valve.
(2) Haeba bohloeki ba khase bo le boholo ho feta kapa bo lekana le 99.99% 'me ntlha ea phoka e ka tlaase ho -60 ° C, OCr18Ni9 tube ea tšepe e sa hloekang (304) e nang le lebota le ka hare la electropolished e lokela ho sebelisoa. Ntle le li- bellows valves tse lokelang ho sebelisoa bakeng sa liphaephe tsa khase tse tukang, li-valve tsa bolo li lokela ho sebelisoa bakeng sa liphaephe tse ling tsa khase.
(3) Haeba ntlha ea phoka ea moea o omileng o hatelletsoeng e le ka tlase ho -70 ° C, peipi ea tšepe e sa hloekang ea OCr18Ni9 (304) e nang le lebota le ka hare le bentšitsoeng e lokela ho sebelisoa. Haeba ntlha ea phoka e le ka tlase ho -40 ℃, phala ea tšepe e sa hloekang ea OCr18Ni9 (304) kapa peipi ea tšepe e se nang seamless e lokela ho sebelisoa. Belofo e lokela ho ba bellows kapa valve ea bolo.
(4) Thepa ea valve e lokela ho lumellana le thepa ea phala e kopanyang.
Ho ea ka litlhoko tsa litlhaloso le mehato e nepahetseng ea tekheniki, re nahana haholo ka lintlha tse latelang ha re khetha thepa ea liphaephe:
(1) Ho kenella ha moea oa thepa ea liphaephe ho lokela ho ba nyane. Liphaephe tsa thepa e fapaneng li na le ho kenella ha moea ho fapaneng. Haeba ho khethiloe liphaephe tse nang le matla a ho feta a moea, tšilafalo e ke ke ea tlosoa. Liphaephe tsa tšepe tse sa hloekang le lipeipi tsa koporo li molemo ho thibela ho kenella le ho bola ha oksijene sepakapakeng. Leha ho le joalo, kaha lipeipi tsa tšepe tse sa hloekang ha li sebetse hakaalo ho feta lipeipi tsa koporo, liphaephe tsa koporo li sebetsa ka thata ho lumella mongobo o sepakapakeng hore o kene ka hare ho tsona. Ka hona, ha u khetha liphaephe bakeng sa liphaephe tsa khase tse hloekileng haholo, liphaephe tsa tšepe tse sa hloekang e lokela ho ba khetho ea pele.
(2) Sebaka se ka hare sa thepa ea phala se adsorbed 'me se na le phello e nyenyane ho hlahloba khase. Ka mor'a hore phala ea tšepe e sa hloekang e sebetsanoe, ho tla bolokoa tekanyo e itseng ea khase ka lesela la eona la tšepe. Ha khase e hloekileng haholo e feta, karolo ena ea khase e tla kena moeeng ebe e baka tšilafalo. Ka nako e ts'oanang, ka lebaka la adsorption le tlhahlobo, tšepe e ka holim'a phala e ka hare e tla boela e hlahise palo e itseng ea phofo, e bakang tšilafalo ho khase e phahameng ea bohloeki. Bakeng sa lisebelisoa tsa liphaephe tse nang le bohloeki ka holimo ho 99.999% kapa boemo ba ppb, 00Cr17Ni12Mo2Ti pipe e tlaase ea carbon stainless steel (316L) e lokela ho sebelisoa.
(3) Liphaephe tsa tšepe tse sa hloekang li sebetsa hantle ho feta lipeipi tsa koporo, 'me lerōle la tšepe le hlahisoang ke khoholeho ea moea le batla le fokola. Lithupelo tsa tlhahiso tse nang le litlhoko tse phahameng tsa bohloeki li ka sebelisa liphaephe tsa tšepe tse sa hloekang tsa 00Cr17Ni12Mo2Ti (316L) kapa OCr18Ni9 (304), lipeipi tsa koporo li ke ke tsa sebelisoa.
(4) Bakeng sa liphaephe tse nang le bohloeki ba khase ka holimo ho 99.999% kapa ppb kapa ppt, kapa likamoreng tse hloekileng tse nang le maemo a bohloeki ba moea a N1-N6 a boletsoeng ho "Clean Factory Design Code", liphaephe tse hloekileng haholo kapaEP lipeipi tse hloekileng haholoe lokela ho sebelisoa. Hloekisa "tšupu e hloekileng e nang le bokaholimo bo boreleli haholo".
(5) Tse ling tsa mekhoa e khethehileng ea lipeipi tsa khase tse sebelisoang ha ho etsoa tlhahiso ke likhase tse senyang haholo. Liphaephe tse tsamaisong ena ea liphaephe li tlameha ho sebelisa lipeipi tsa tšepe tse sa jeng tse thibelang ho bola e le liphaephe. Ho seng joalo, liphaephe li tla senyeha ka lebaka la ho bola. Haeba matheba a kutu a hlaha ka holim'a metsi, liphaephe tse tloaelehileng tsa tšepe tse se nang moeli kapa lipeipi tsa tšepe tse entsoeng ka masenke li ke ke tsa sebelisoa.
(6) Ha e le hantle, likhokahano tsohle tsa lipeipi tsa khase li lokela ho chesetsoa. Kaha ho chesetsoa ha lipeipi tsa tšepe ho tla senya lera la masenke, lipeipi tsa tšepe ha li sebelisoe bakeng sa liphaephe tse ka likamoreng tse hloekileng.
Ha ho nahanoa ka lintlha tse kaholimo, lipeipi tsa lipeipi tsa khase le li-valve tse khethiloeng morerong oa &7& li tjena:
Liphaephe tsa tsamaiso ea naetrojene e phahameng (PN2) li entsoe ka 00Cr17Ni12Mo2Ti liphaephe tsa tšepe tse se nang carbon tse tlaase (316L) tse nang le marako a ka hare a electropolished, 'me li-valve li entsoe ka li-valve tsa tšepe tse sa hloekang tsa thepa e tšoanang.
Liphaephe tsa tsamaiso ea naetrojene (N2) li entsoe ka 00Cr17Ni12Mo2Ti liphaephe tsa tšepe tse se nang carbon tse tlaase (316L) tse nang le marako a ka hare a electropolished, 'me li-valve li entsoe ka li-valve tsa tšepe tse sa hloekang tsa thepa e tšoanang.
Liphaephe tsa tsamaiso ea high-purity hydrogen (PH2) li entsoe ka 00Cr17Ni12Mo2Ti liphaephe tsa tšepe tse se nang carbon tse tlaase (316L) tse nang le marako a ka hare a electropolished, 'me li-valve li entsoe ka li-valve tsa tšepe tse sa hloekang tsa thepa e tšoanang.
Liphaephe tsa tsamaiso ea oksijene e hloekileng haholo (PO2) li entsoe ka 00Cr17Ni12Mo2Ti liphaephe tsa tšepe tse se nang carbon tse tlaase (316L) tse nang le marako a ka hare a entsoeng ka motlakase, 'me li-valve li entsoe ka li-valve tsa tšepe tse sa hloekang tsa thepa e tšoanang.
Liphaephe tsa tsamaiso ea Argon (Ar) li entsoe ka 00Cr17Ni12Mo2Ti lipeipi tsa tšepe tse se nang carbon tse tlaase (316L) tse nang le marako a ka hare a electropolished, 'me ho sebelisoa li-valve tsa tšepe tse sa hloekang tsa thepa e tšoanang.
Liphaephe tsa tsamaiso ea helium (He) li entsoe ka 00Cr17Ni12Mo2Ti liphaephe tsa tšepe tse se nang carbon tse tlaase (316L) tse nang le marako a ka hare a motlakase, 'me li-valve li entsoe ka li-valve tsa tšepe tse sa hloekang tsa thepa e tšoanang.
Liphaephe tsa tsamaiso ea moea (CDA) tse hloekileng tse omeletseng li entsoe ka liphaephe tsa tšepe tse sa hloekang tsa OCr18Ni9 (304) tse nang le mabota a ka hare a bentšitsoeng, 'me li-valve li entsoe ka li-valve tsa tšepe tse sa hloekang tsa thepa e tšoanang.
Liphaephe tsa tsamaiso ea moea (BA) tse phefumolohang li entsoe ka liphaephe tsa tšepe tse sa hloekang tsa OCr18Ni9 (304) tse nang le marako a ka hare a bentšitsoeng, 'me li-valve li entsoe ka li-valve tsa tšepe tse sa hloekang tsa thepa e tšoanang.
Liphaephe tsa tsamaiso ea vacuum (PV) li entsoe ka liphaephe tsa UPVC, 'me li-valve li entsoe ka li-valve tsa vacuum butterfly tse entsoeng ka thepa e tšoanang.
Liphaephe tsa tsamaiso ea vacuum (HV) li entsoe ka lipeipi tsa UPVC, 'me li-valve li entsoe ka li-valve tsa vacuum butterfly tse entsoeng ka thepa e tšoanang.
Liphaephe tsa tsamaiso e khethehileng ea khase kaofela li entsoe ka 00Cr17Ni12Mo2Ti liphaephe tsa tšepe tse se nang carbon tse tlaase (316L) tse nang le marako a ka hare a electropolished, 'me li-valve li entsoe ka li-valve tsa tšepe tse sa hloekang tsa thepa e tšoanang.
3 Kaho le ho kenya lipeipi
3.1 Karolo ea 8.3 ea "Khoutu ea Moralo oa Kaho ea Feme e Hloekileng" e hlakisa lipehelo tse latelang bakeng sa likhokahano tsa lipeipi:
(1) Mahokelo a liphaephe a lokela ho chesoa, empa liphaephe tsa tšepe tse kolobisitsoeng ka hot-dip li lokela ho kengoa.
(2) Lipeipi tsa tšepe tse sa hloekang li lokela ho hokeloa ka tjheseletso ea argon arc le welding ea butt kapa socket welding, empa liphaephe tsa khase tse hloekileng haholo li lokela ho hokeloa ka litšepe tse se nang matšoao leboteng le ka hare.
(3) Khokahano lipakeng tsa liphaephe le thepa e tlameha ho tsamaellana le litlhoko tsa khokahano ea thepa.
(4) Kamano pakeng tsa lipeipi le li-valve e lokela ho lumellana le melao e latelang
① Thepa e tiisang e hokahanyang liphaephe le li-valve tsa khase e hloekileng haholo li lokela ho sebelisa likhase tsa tšepe kapa li-ferrules tse habeli ho latela litlhoko tsa ts'ebetso ea tlhahiso le litšobotsi tsa khase.
② Thepa ea ho tiisa khokahanyo e khoele kapa ea flange e lokela ho ba polytetrafluoroethylene.
3.2 Ho ea ka litlhoko tsa litlhaloso le mehato e amehang ea tekheniki, ho hokeloa ha liphaephe tsa khase tse hloekileng haholo ho lokela ho chesetsoa ka hohle kamoo ho ka khonehang. Ho tjheseletsa butt ka kotloloho ho lokela ho qojwa nakong ya welding. Matsoho a liphaephe kapa manonyeletso a phethiloeng a lokela ho sebelisoa. Liphaephe tsa liphaephe li lokela ho etsoa ka thepa e tšoanang le boreleli bo ka hare bo ka hare joaloka liphaephe. boemo, nakong ea welding, e le ho thibela oxidation ea karolo ea welding, khase e hloekileng e sireletsang e lokela ho kenngoa ka phala ea welding. Bakeng sa liphaephe tsa tšepe tse sa hloekang, ho lokela ho sebelisoa argon arc welding, 'me khase ea argon ea bohloeki bo tšoanang e lokela ho kenngoa ka phala. Ho tlameha ho sebelisoa khokahanyo ea khoele kapa khokahanyo ea khoele. Ha o kopanya li-flange, li-ferrules li lokela ho sebelisoa bakeng sa likhokahano tse nang le likhoele. Ntle le liphaephe tsa oksijene le liphaephe tsa haedrojene, tse lokelang ho sebelisa likhase tsa tšepe, liphaephe tse ling li lokela ho sebelisa polytetrafluoroethylene gaskets. Ho sebelisa rabara e nyenyane ea silicone ho li-gaskets ho tla boela ho atlehe. Ntlafatsa phello ea ho tiisa. Mehato e tšoanang e lokela ho nkoa ha likhokahano tsa flange li etsoa.
Pele mosebetsi oa ho kenya o qala, tlhahlobo e qaqileng ea pono ea liphaephe,lisebelisoa, li-valve, joalo-joalo li tlameha ho etsoa. Lerako le ka hare la liphaephe tse tloaelehileng tsa tšepe tse sa hloekang li lokela ho khethoa pele li kenngoa. Liphaephe, li-valve, joalo-joalo tsa liphaephe tsa oksijene li lokela ho haneloa ka thata ho oli, 'me li lokela ho tlosoa ka thata ho latela litlhoko tse amehang pele li kenngoa.
Pele tsamaiso e kenngoa le ho sebelisoa, tsamaiso ea lipeipi tsa phetisetso le kabo e lokela ho hloekisoa ka ho feletseng ka khase e hloekileng e phahameng. Sena ha se felise feela likaroloana tsa lerōle tse ileng tsa oela ka phoso tsamaisong nakong ea ts'ebetso ea ho kenya, empa hape li phetha karolo ea ho omisa tsamaisong ea liphaephe, ho tlosa karolo ea khase e nang le mongobo e kenngoa ke lebota la liphaephe esita le thepa ea phala.
4. Teko ea khatello ea liphaephe le ho amoheloa
(1) Kamora hore sistimi e kenngoe, tlhahlobo ea radiographic ea 100% ea liphaephe tse tsamaisang maro a chefo haholo ka liphaephe tse khethehileng tsa khase li tla etsoa, 'me boleng ba tsona bo ke ke ba ba tlase ho Level II. Liphaephe tse ling li tla lokela ho hlahlojoa ka lisampole tsa radiographic, 'me tekanyo ea tlhahlobo ea sampole e se be ka tlase ho 5%, boleng ha bo na ho ba tlase ho sehlopha sa III.
(2) Ka mor'a ho feta tlhahlobo e sa senyeheng, teko ea khatello e lokela ho etsoa. E le ho etsa bonnete ba ho omella le bohloeki ba tsamaiso ea liphaephe, tlhahlobo ea khatello ea hydraulic ha ea lokela ho etsoa, empa teko ea khatello ea moea e lokela ho sebelisoa. Teko ea khatello ea moea e lokela ho etsoa ka naetrojene kapa moea o hatelitsoeng o lumellanang le boemo ba bohloeki ba phaposi e hloekileng. Khatello ea teko ea pipeline e lokela ho ba makhetlo a 1.15 ho feta khatello ea moralo, 'me khatello ea teko ea phaephe ea vacuum e lokela ho ba 0.2MPa. Nakong ea teko, khatello e lokela ho eketseha butle-butle le butle-butle. Ha khatello e nyolohela ho 50% ea khatello ea teko, haeba ho se na ntho e sa tloaelehang kapa ho lutla ho fumanoeng, tsoela pele ho eketsa khatello ea mohato ka mohato ka 10% ea khatello ea teko, 'me u tsitsise khatello ea metsotso ea 3 boemong bo bong le bo bong ho fihlela khatello ea teko. . Tsitsisa khatello ea metsotso ea 10, ebe o fokotsa khatello ho khatello ea moralo. Nako ea ho emisa khatello e lokela ho khethoa ho latela litlhoko tsa ho lemoha ho lutla. Moemeli oa foaming oa tšoaneleha haeba ho se na ho lutla.
(3) Ka mor'a hore tsamaiso ea vacuum e fetise teko ea khatello, e boetse e lokela ho etsa tlhahlobo ea tekanyo ea lihora tse 24 ho latela litokomane tsa moralo, 'me sekhahla sa khatello ha sea lokela ho feta 5%.
(4) Tlhahlobo ea ho lutla. Bakeng sa lits'ebetso tsa liphaephe tsa ppb le ppt, ho latela litlhaloso tse amehang, ha ho na ho lutla ho lokelang ho nkuoa e le ho tšoanelehang, empa tlhahlobo ea palo ea ho lutla e sebelisoa nakong ea moralo, ke hore, tlhahlobo ea palo ea ho lutla e etsoa kamora tlhahlobo ea ho tiisa moea. Khatello ke khatello ea ho sebetsa, 'me khatello e emisoa ka lihora tse 24. Kakaretso ea ho lutla ka hora e ka tlase ho kapa e lekana le 50ppm joalo ka ha e tšoaneleha. Palo ea leakage ke e latelang:
A=(1-P2T1/P1T2)*100/T
Ka foromo:
Ho lutla ha hora (%)
P1 - Khatello e felletseng qalong ea tlhahlobo (Pa)
P2-Khatello e felletseng qetellong ea tlhahlobo (Pa)
T1 - mocheso o felletseng qalong ea tlhahlobo (K)
T2 - mocheso o felletseng qetellong ea tlhahlobo (K)
Nako ea poso: Dec-12-2023